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Semitron® PAI Family of Products
Semitron® PAI is a portfolio of polyamide imide materials developed for extremely demanding applications in semiconductor and electronic device manufacturing, such as high voltage ranges, high temperatures, and vacuum chamber applications requiring high levels of ionic purity. Each product offers the exceptional mechanical and thermal properties of PAI, with special formulations to meet the stringent purity and voltage requirements of semiconductor manufacturing. From resisting dielectric breakdown and voltages ranging from 100V to 1000V, to low rates of outgassing and erosion in plasma chambers, Semitron® PAI outlast and out-perform other materials used in the semiconductor and electronics industry.
Products in the Semitron® PAI Family of Products
Semitron® MPR-1000
Semitron® MPR 1000 shapes possess excellent heat resistance and low rates of outgassing and erosion in plasma chambers. This high purity material with low ionic content is often chosen for vacuum chamber applications within etch, CVD, and ion implant sub segmentations in the semiconductor and electronics industry.
Semitron® MPR 1000 shows increased lifetime over traditional materials, for example up to 25x over polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.
Semitron® MPR 1000 shows increased lifetime over traditional materials, for example up to 25x over polyimide in ozone in some cases. Due to its longevity, it is specified against traditional materials used in vacuum chamber applications such as quartz, ceramics, polyimides and other engineering plastics.
- Low ionic content & low outgassing
- Excellent heat resistance
- Minimized rate of erosion in plasma chambers
- Optimal chip resistance, durability, and machinability
- Designed specifically for demanding chamber applications
Material properties
Semitron® ESD 520HR PAI
Semitron® ESD 520HR is an electrostatic dissipative PAI material that possesses the unique ability to resist dielectric breakdown at high voltages. As a result, Semitron® ESD 520HR is the only Semitron® grade that maintains its performance throughout the 100V to 1000V voltage range while also offering the mechanical performance needed to excel in demanding applications. This characteristic, combined with its high strength and heat resistance, make Semitron® ESD 520HR an ideal solution for test equipment and device handling applications within the semiconductor and electronics industry.
- Resistant to dielectric breakdown from 100V to 1000V
- Electrostatic dissipative
- High mechanical strength
- High heat resistance
Material properties
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